2015, 2001, English, Article, Journal or magazine article edition: Fabrication of epitaxial CoSi₂ nanowires Kluth, P.; Zhao, Q. T.; Winnerl, S.; ...

User activity

Share to:
 
Bookmark: https://trove.nla.gov.au/version/219895087
Physical Description
  • journal article
Published
  • American Institute of Physics (AIP), 2015-11-23T01:04:49Z 2001-08-06 2015-12-08T08:59:12Z
Language
  • English

Edition details

Title
  • Fabrication of epitaxial CoSi₂ nanowires
Author
  • Kluth, P.
  • Zhao, Q. T.
  • Winnerl, S.
  • Lenk, S.
  • Mantl, S.
Published
  • American Institute of Physics (AIP), 2015-11-23T01:04:49Z 2001-08-06 2015-12-08T08:59:12Z
Physical Description
  • journal article
Part Of
  • Applied Physics Letters
Summary
  • We have developed a method for fabricatingepitaxialCoSi₂nanowires using only conventional optical lithography and standard silicon processing steps. This method was successfully applied to ultrathin epitaxialCoSi₂ layers grown on Si(100) and silicon-on-insulator substrates. A nitride mask induces a stress field near its edges into the CoSi₂/​Siheterostructure and leads to the separation of the CoSi₂ layer in this region during a rapid thermal oxidation step. A subsequent etching step and a second oxidation generate highly homogenous silicide wires with dimensions down to 50 nm.
Terms of Use
  • http:/​/​www.sherpa.ac.uk/​romeo/​issn/​0003-6951..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 23/11/15). Copyright 2001 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https:/​/​doi.org/​10.1063/​1.1390318
Language
  • English
Related Resource
Identifier
  • oai:digitalcollections.anu.edu.au:1885/​16595
  • oai:openresearch-repository.anu.edu.au:1885/​16595
  • 0003-6951
  • 10.1063/​1.1390318

Get this edition

Other links

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • ACT (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment