English, Article edition: SIMS STUDIES OF Cl-DOPED ZnSe EPILAYERS GROWN BY MBE F. S. GARD; J. D. RILEY; K. PRINCE

User activity

Share to:
 
Bookmark: http://trove.nla.gov.au/version/85008
Physical Description
  • article
Language
  • English

Edition details

Title
  • SIMS STUDIES OF Cl-DOPED ZnSe EPILAYERS GROWN BY MBE
Author
  • F. S. GARD
  • J. D. RILEY
  • K. PRINCE
Physical Description
  • article
Notes
  • Chlorine is one of the most used species to produce n-type ZnSe epilayers. In this paper, we present Secondary Ion Mass Spectrometry (SIMS) profiles of a series of Cl-doped ZnSe samples, which were grown by Molecular Beam Epitaxy (MBE) technique on GaAs substrates. These profiles have been used to examine the limitation of SIMS analysis of narrow Cl-delta layers. In order to convert SIMS raw data to quantified data, the depth profile from a Cl-implanted standard sample has been used to estimate the "useful ion yield" of chlorine and thus the instrumental sensitivity for chlorine in a ZnSe matrix. The "useful ion yield" and detection limit of chlorine in the ZnSe host matrix were calculated to be 4.7 Ã 10-7 and 5 Ã 1017 atoms/​cm3, respectively.
  • SIMS, MBE, GaAs, ZnSe
  • RePEc:wsi:srlxxx:v:13:y:2006:i:02:p:215-220
Language
  • English
Contributed by
OAIster

Get this edition

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • Unknown (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment