English, Article edition: THE PROPERTIES OF AMORPHOUS CARBON NITRIDE THIN FILMS SYNTHESIZED BY PULSED LASER DEPOSITION WITH VARIOUS PREPARATION CONDITIONS M. RUSOP; T. SOGA; T. JIMBO

User activity

Share to:
 
Bookmark: http://trove.nla.gov.au/version/85001
Physical Description
  • article
Language
  • English

Edition details

Title
  • THE PROPERTIES OF AMORPHOUS CARBON NITRIDE THIN FILMS SYNTHESIZED BY PULSED LASER DEPOSITION WITH VARIOUS PREPARATION CONDITIONS
Author
  • M. RUSOP
  • T. SOGA
  • T. JIMBO
Physical Description
  • article
Notes
  • Surface morphology, deposition rate, bonding composition, structural, optical and electrical properties of XeCl excimer pulsed laser deposited amorphous carbon nitride (a-CNx) films using camphoric carbon (C10H16O) target in 0.8 Torr nitrogen (N) gas ambient as a function of laser fluences (LF) (from 2.8 to 5.2 J/​cm2) with fixed target-to-substrate distances (TSD) at 45 mm and substrate temperatures (ST) at 20°C; TSD (from 25 to 45 mm) with fixed LF at 3.4 J/​cm2 and ST at 20°C; and ST (from 20 to 500°C) with fixed LF at 3.4 J/​cm2 and TSD at 45 mm are reported. At fixed TSD and ST, the surface roughness, particle density, deposition rate and N content increase, whereas the particle size decreases with higher LF. When the LF and ST are fixed, decreasing TSD results in an increase in the irregular small particle size, particle density, surface roughness, deposition rate, N content. On the other hand, when the LF and TSD are fixed, the surface roughness, particle density and particle size increase, whereas the deposition rate decreases with higher ST. The N content increases with ST up to 400°C and decreases thereafter. We found that the amorphous structure of a-CNx films and the ratio of sp2 trihedral component to sp3 tetrahedral component are strongly dependent on the LF, TSD and ST. The a-CNx films with high N content have relatively high electrical resistivity.
  • Amorphous carbon nitride, deposition parameter, pulsed laser deposition
  • RePEc:wsi:srlxxx:v:12:y:2005:i:03:p:333-342
Language
  • English
Contributed by
OAIster

Get this edition

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • Unknown (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment