STUDY ON METAL MEMBRANE TEMPERATURE SENSOR AND MICROHEATER FOR PCR CHIP
The development of PCR chip shortens the reaction time of DNA amplification, reduces the bulk of reaction reagents; therefore, it is widely applied to biomedicine and other related fields. Since PCR reaction is completed through three different precise temperature zones periodically, the sensitivity of temperature measurement and the heating property of the metal membrane must be highly regarded. In this paper, three kinds of membranes, Ni, Pt, and NiâCr, were fabricated on silicon substrates; their resistanceâtemperature characteristics and heating properties are discussed. The results show that Ni and Pt films have good linear resistanceâtemperature relationship; the heating property of Pt film is superior to that of NiâCr film. The PCR chip with Pt film microheater can reach 150Â°C in a short time with 25 V voltage.
PCR Chip, metal membrane, temperature sensor, microheater
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