English, Article edition: PHYSICAL PROPERTIES OF AU AND AL THIN FILMS MEASURED BY RESISTIVE HEATING F. AVILÃS; O. CEH; A. I. OLIVA

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Bookmark: http://trove.nla.gov.au/version/84646
Physical Description
  • article
Language
  • English

Edition details

Title
  • PHYSICAL PROPERTIES OF AU AND AL THIN FILMS MEASURED BY RESISTIVE HEATING
Author
  • F. AVILÃS
  • O. CEH
  • A. I. OLIVA
Physical Description
  • article
Notes
  • The electrical resistivity (Ï), resistive thermal coefficient (αr), thermal expansion coefficient (αt) and stress (Ï) of Al and Au thin films deposited by thermal evaporation were measured while films were heated by Joule effect. Electrical resistivity measured by the four-probe technique was simultaneously measured with surface film temperature in real time. Au films show important variations in the αr and Ï properties when thickness ranged from 0.1μm to 1μm; contrarily, Al films show insignificant variations in the 0.1μm to 2γm thickness range. The role of the surface aluminum oxide on these measurements and the intrinsic stress on films determined with grazing incidence X-rays are discussed.
  • Gold, aluminum, resistive thermal coefficients, metallic thin films, 65.70.+y, 67.80.Gb, 68.55.Jk, 81.05.Bx, 73.61.At
  • RePEc:wsi:srlxxx:v:12:y:2005:i:01:p:101-106
Language
  • English
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