English, Article edition: EFFECT OF THE C2H2 AND N2 FLOW RATE ON NANOCOMPOSITE nc-ZrCN/a-C:H(N) FILM SYNTHESIZED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE KUI ZHOU; XIANYING WU; XU ZHANG; ...

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Bookmark: http://trove.nla.gov.au/version/84630
Physical Description
  • article
Language
  • English

Edition details

Title
  • EFFECT OF THE C2H2 AND N2 FLOW RATE ON NANOCOMPOSITE nc-ZrCN/​a-C:H(N) FILM SYNTHESIZED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE
Author
  • KUI ZHOU
  • XIANYING WU
  • XU ZHANG
  • LIZHAO QIN
  • BIN LIAO
Physical Description
  • article
Notes
  • Nanocomposite nc-ZrCN/​a-C:H(N) films were prepared by filtered cathodic vacuum arc technique using the C2H2 and N2 gas as the precursor. The effect of the C2H2 and N2 flow rate on the microstructure, internal stress, phase composition, and mechanical properties of nanocomposite nc-ZrCN/​a-C:H(N) films has been investigated by glancing incidence X-ray diffraction (GIXRD), surface profiler, and X-ray photoelectron spectroscopy(XPS). It was revealed that the C2H2 and N2 flow rate affected the structure, Zr content, and internal stress of the films significantly. Furthermore, XRD pattern indicated the presence of the ZrCN crystalline grains in the range of 3â10 nm, and the deconvolution results for XPS spectra showed that the film mainly was constituted by ZrâC, C=​C(sp2) and CâC(sp3) bonds.
  • Filtered cathodic vacuum arc technique, nanocomposite nc-ZrCN/​a-C:H(N), flow rate
  • RePEc:wsi:srlxxx:v:15:y:2008:i:06:p:781-786
Language
  • English
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