English, Article edition: SYNTHESIS AND PROPERTY STUDY OF NANOPARTICLE QUATERNARY SEMICONDUCTOR SiCAlN FILMS WITH CO-SPUTTERING UNDER LOWER TEMPERATURE SHIYONG HUANG; S. XU; JIDONG LONG; ...

User activity

Share to:
 
Bookmark: http://trove.nla.gov.au/version/84519
Physical Description
  • article
Language
  • English

Edition details

Title
  • SYNTHESIS AND PROPERTY STUDY OF NANOPARTICLE QUATERNARY SEMICONDUCTOR SiCAlN FILMS WITH CO-SPUTTERING UNDER LOWER TEMPERATURE
Author
  • SHIYONG HUANG
  • S. XU
  • JIDONG LONG
  • ZHENHONG DAI
  • YUANPING SUN
Physical Description
  • article
Notes
  • Quaternary SiCAlN nanoparticle films were produced by reactive rf magnetron co-sputtering technique with a chemically pure SiC and an Al target under low temperature. The crystalline structure, surface morphology, and element content of the films were studied in terms of sputtering parameters. The element content and chemical states of SiCAlN films were measured by means of energy dispersive X-ray fluorescence (EDX) and X-ray photoelectronic spectroscopy (XPS). Surface morphology of SiCAlN films was investigated by FE-SEM.
  • Nanoparticle film, co-sputtering, surface morphology, low temperature
  • RePEc:wsi:srlxxx:v:12:y:2005:i:03:p:397-400
Language
  • English
Contributed by
OAIster

Get this edition

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • Unknown (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment