English, Article edition: EFFECT OF FILTER COIL CURRENT ON PROPERTIES OF nc-TiC/a-C:H NANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE YAOHUI WANG; XU ZHANG; XIANYING WU; ...

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Bookmark: http://trove.nla.gov.au/version/84459
Physical Description
  • article
Language
  • English

Edition details

Title
  • EFFECT OF FILTER COIL CURRENT ON PROPERTIES OF nc-TiC/​a-C:H NANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE
Author
  • YAOHUI WANG
  • XU ZHANG
  • XIANYING WU
  • HUIXING ZHANG
  • XIAOJI ZHANG
Physical Description
  • article
Notes
  • Nanocomposite nc-TiC/​a-C:H films, with an unusual combination of superhardness and high elastic recovery, are prepared by using dual plasma technique. The effect of the filter coil current on the compositional and structural properties of the nc-TiC/​a-C:H films has been investigated. It is found that the deposition rate and the composition of nc-TiC/​a-C:H films could be changed by varying the filter coil current. Fortunately, by selecting the proper value of the filter coil current, 2.5 A, one can remarkably enhance the mechanical properties of the film, such as the superhardness (66.4 GPa), the high elastic modulus (510 GPa), and the high elastic recovery (83.3%).
  • Nanocomposite nc-TiC/​a-C:H, plasma, mechanical property, filter coil current
  • RePEc:wsi:srlxxx:v:14:y:2007:i:06:p:1143-1148
Language
  • English
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