English, Article edition: MAGNETRON SPUTTERING DEPOSITION OF POLYCRYSTALLINE CrN/ZrN SUPERLATTICE COATINGS M. X. WANG; J. J. ZHANG; Q. X. LIU; ...

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Physical Description
  • article
Language
  • English

Edition details

Title
  • MAGNETRON SPUTTERING DEPOSITION OF POLYCRYSTALLINE CrN/​ZrN SUPERLATTICE COATINGS
Author
  • M. X. WANG
  • J. J. ZHANG
  • Q. X. LIU
  • D. J. LI
Physical Description
  • article
Notes
  • The influence of substrate rotary speed, species of reaction gases and flows on nanoindentation, nanoscratch fracture, and residual stress were explored on reactive sputtered nanoscale CrN/​ZrN multilayered coatings. Hardness and critical fracture load as high as 32 GPa and 85 mN with desirable compressive stress were achieved for this model. A proper percentage of NH3 in N2 reaction gas was also proved to be of benefit to synthesize high-hard and fracture-resistant CrN/​ZrN coatings. The low-angle XRD patterns provided the layer modulation period of the coatings. A marked polycrystallite of two-cubic NaCl phase CrN + ZrN as well as probably hexagonal Cr2N with small modulation period corresponded to the enhanced mechanical properties.
  • Magnetron sputtering, CrN/​ZrN, multilayered coating, nanoindentation
  • RePEc:wsi:srlxxx:v:13:y:2006:i:02:p:173-177
Language
  • English
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