English, Article edition: EFFECT OF BORON WEIGHT PERCENTAGES IN THE TARGET OF PULSED LASER DEPOSITION ON THE PREPARATION OF BORON-DOPED AMORPHOUS CARBON FILMS M. RUSOP; T. KINUGAWA; T. SOGA; ...

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Physical Description
  • article
Language
  • English

Edition details

Title
  • EFFECT OF BORON WEIGHT PERCENTAGES IN THE TARGET OF PULSED LASER DEPOSITION ON THE PREPARATION OF BORON-DOPED AMORPHOUS CARBON FILMS
Author
  • M. RUSOP
  • T. KINUGAWA
  • T. SOGA
  • T. JIMBO
Physical Description
  • article
Notes
  • The effect of boron weight percentage in the camphoric carbon target of pulsed laser deposition on the preparation of boron-doped amorphous carbon (a-C:B) films has been studied using standard measurement techniques. XPS results showed the a-C:B films bonding properties almost unchanged at lower Bwt% up to 10 Bwt%, after which it changes with the increase of Bwt%, indicating increasing doping concentration with increase of Bwt% in the target. This phenomenon is further supported by FTIR and Visible-Raman spectroscopy analyses. The variation of bonding and structural properties are also correlated with the optical gap (Eg) and electrical resistivity (Ï) characteristics which are related to successful doping of B for low content of B in the amorphous carbon (a-C) films as the bonding, structural and Eg remain almost unchanged, and the Ï decreased untill the film deposited at 10 Bwt%. Since both the Eg and Ï decrease sharply with higher Bwt%, this phenomenon can be related to the graphitization.
  • Camphor, boron, doping, target, Pld, XPS, FTIR, electrical properties
  • RePEc:wsi:srlxxx:v:12:y:2005:i:01:p:27-34
Language
  • English
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