English, Article edition: X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES ON THE BONDING PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS SYNTHESIZED BY PULSED LASER DEPOSITION WITH DIFFERENT SUBSTRATE TEMPERATURES M. RUSOP; T. SOGA; T. JIMBO

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Bookmark: http://trove.nla.gov.au/version/84051
Physical Description
  • article
Language
  • English

Edition details

Title
  • X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES ON THE BONDING PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS SYNTHESIZED BY PULSED LASER DEPOSITION WITH DIFFERENT SUBSTRATE TEMPERATURES
Author
  • M. RUSOP
  • T. SOGA
  • T. JIMBO
Physical Description
  • article
Notes
  • Amorphous carbon nitride films (a-CNx) were deposited by pulsed laser deposition of camphoric carbon target with different substrate temperatures (ST). The influence of ST on the synthesis of a-CNx films was investigated. The nitrogen-to-carbon (N/​C) and oxygen-to-carbon (O/​C) atomic ratios, bonding state, and microstructure of the deposited a-CNx films were characterized by X-ray photoelectron spectroscopy and were confirmed by other standard measurement techniques. The bonding states between C and N, and C and O in the deposited films were found to be significantly influenced by ST during the deposition process. The N/​C and O/​C atomic ratios of the a-CNx films reached the maximum value at 400°C. ST of 400°C was proposed to promote the desired sp3-hybridized C and the C3N4 phase. The CâN bonding of CâN, C=​N and Câ¡N were observed in the films.
  • Bonding, XPS, camphoric carbon, amorphous carbon nitride, a-CNx, PLD, substrate temperature
  • RePEc:wsi:srlxxx:v:12:y:2005:i:02:p:185-195
Language
  • English
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