English, Article edition: OPTICAL AND ELECTRICAL PROPERTIES OF La2O3 FILMS PREPARED BY ION BEAM ASSISTANT ELECTRON BEAM EVAPORATION CHEN YANG; HUIQING FAN; SHAOJUN QIU; ...

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Bookmark: http://trove.nla.gov.au/version/83921
Physical Description
  • article
Language
  • English

Edition details

Title
  • OPTICAL AND ELECTRICAL PROPERTIES OF La2O3 FILMS PREPARED BY ION BEAM ASSISTANT ELECTRON BEAM EVAPORATION
Author
  • CHEN YANG
  • HUIQING FAN
  • SHAOJUN QIU
  • YINGXUE XI
  • YUNFEI FU
Physical Description
  • article
Notes
  • La2O3 films were deposited on Si(100) substrates by ion beam assistant electron beam evaporation and were annealed at 450â900°C. Crystalline structure was found to change from amorphous structure to cubic and hexagonal structure with the rise in annealing temperature. The near infrared transmittance of the film annealed at 600°C was relatively high and could be further increased using assistant ion beam in deposition. The maximum leakage current density increased dramatically from 10-7 to 10-4 A/​cm2 with the rise in annealing temperature. The film annealed at 600°C with cubic structure had a relatively high dielectric constant of ~18.
  • La2O3 films, electron beam evaporation, film structure, optical and electrical properties
  • RePEc:wsi:srlxxx:v:15:y:2008:i:03:p:271-275
Language
  • English
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