English, Article edition: SEPARATED CuInSe2 QUANTUM DOTS ON ZnO THIN FILM BY ICP-ASSISTED MAGNETRON SPUTTERING S. Y. HUANG; S. XU; J. D. LONG; ...

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Physical Description
  • article
Language
  • English

Edition details

Title
  • SEPARATED CuInSe2 QUANTUM DOTS ON ZnO THIN FILM BY ICP-ASSISTED MAGNETRON SPUTTERING
Author
  • S. Y. HUANG
  • S. XU
  • J. D. LONG
  • Q. J. CHENG
  • X. B. XU
  • J. B. CHU
Physical Description
  • article
Notes
  • Uniformly hemispherical separated CuInSe2 (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer layer. The average lateral size and densities of the QDs could be controlled by appropriate deposition parameters. The distribution scope of diameters was from 40 to 120 nm, density was from 4.5E9 to 2.1E11/​cm2. Field-emission scanning electron microscope (FE-SEM) and energy-dispersive X-ray (EDX) spectrometer were adopted to measure the properties of CIS QDs.
  • CIS, quantum dots, ICP-assisted magnetron
  • RePEc:wsi:srlxxx:v:14:y:2007:i:02:p:225-228
Language
  • English
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