English, Article edition: CORRELATION OF TETRAHEDRAL AND TRIHEDRAL BONDING PROPERTIES IN AMORPHOUS CAMPHORIC CARBON THIN FILMS M. RUSOP; T. SOGA; T. JIMBO

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Physical Description
  • article
Language
  • English

Edition details

Title
  • CORRELATION OF TETRAHEDRAL AND TRIHEDRAL BONDING PROPERTIES IN AMORPHOUS CAMPHORIC CARBON THIN FILMS
Author
  • M. RUSOP
  • T. SOGA
  • T. JIMBO
Physical Description
  • article
Notes
  • The tetrahedral carbon (ta-C) and boron doped amorphous carbon (a-C:B) thin films have been grown by pulsed laser deposition. The respective effects of diamond percentages by weight in the target (Dwt%) and boron percentages by weight in the camphoric carbon target (Bwt%), on the tetrahedral (sp3) and trihedral (sp2) bonding properties are discussed. The optical gap Eg and electrical resistivity Ï increase with Dwt%, up to 1.6 eV and 5.63 à 107 Ω cm respectively, for the film deposited using target with 50 Dwt%. We found that the Dwt% has modified the sp3 bonds content and the morphology of the carbon films. On the other hand, the Eg of a-C:B films is almost unchanged at about 0.95 eV up to 10 Bwt% and decreases thereafter to 0.6 eV at 16 Bwt%. The Ï increases initially to 2.29 à 106 Ω cm at 2 Bwt%, and decreases thereafter up to 4.58 à 105 and 1.82 à 104 Ω cm at 10 and 16 Bwt%, respectively. The variation of structural properties, Eg and Ï, can be related to the successful doping of B in the a-C films at low content of Bwt% (up to 10 Bwt%), as the structural properties and Eg remain almost unchanged and the Ï decreased. Since both Eg and Ï decreased sharply with higher Bwt%, this phenomenon can be related to graphitization. In this paper, the dependence of sp3 and sp2 impurity content on the growth and growth conditions of the films are also studied.
  • Amorphous carbon, tetrahedral, diamond, boron doping, camphoric carbon, pulsed laser deposition, AFM, FTIR, XPS
  • RePEc:wsi:srlxxx:v:12:y:2005:i:03:p:325-332
Language
  • English
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