English, Article edition: THE RAMAN SPECTRA CHARACTERISTICS OF a-CNx FILMS GROWN ON QUARTZ SUBSTRATES BY NEWLY DEVELOPED SURFACE WAVE MICROWAVE PECVD M. RUSOP; S. ABDULLAH; S. ADHIKARI; ...

User activity

Share to:
 
Bookmark: http://trove.nla.gov.au/version/83873
Physical Description
  • article
Language
  • English

Edition details

Title
  • THE RAMAN SPECTRA CHARACTERISTICS OF a-CNx FILMS GROWN ON QUARTZ SUBSTRATES BY NEWLY DEVELOPED SURFACE WAVE MICROWAVE PECVD
Author
  • M. RUSOP
  • S. ABDULLAH
  • S. ADHIKARI
  • A. M. M. OMER
  • T. SOGA
  • T. JIMBO
  • M. UMENO
Physical Description
  • article
Notes
  • Amorphous carbon nitride (a-CNx) films were deposited on quartz substrates by newly developed surface wave microwave plasma chemical vapor deposition (SWMP-CVD) of alcohol camphoric carbon plasma source at room temperature. Then the a-CNx films were heat-treated at various annealing temperatures (AT) in the 100â500°C range. The effects of heat treatment on the structural modifications were studied by Visible-Raman spectroscopy through the evolution of D and G peaks. The spectral evolution observed on heat-treated a-CNx shows progressive formation of crystallites. Raman spectra have revealed the amorphous structure of as-grown a-CNx films and the growth of nanocrystallinity upon increase of AT. These structural changes were further correlated with optical band gap and fraction of sp3 bonded carbons present, derived respectively from the UV-visible and photoelectron spectroscopy. The wide range of optical absorption coefficient characteristics is observed depending on the AT. The optical band gap of as-grown a-CNx films is found to be approximately 2.8 eV; it gradually decreases to 2.5 eV for the films heat-treated at 300°C and then it decreases rapidly to 0.9 eV at 500°C. The results obtained are discussed and compared with the literatures.
  • a-CNx, structural, Raman, optical properties, absorbance, crystallite size, annealing temperature, surface wave
  • RePEc:wsi:srlxxx:v:13:y:2006:i:05:p:577-583
Language
  • English
Contributed by
OAIster

Get this edition

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • Unknown (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment