SUPERHYDROPHOBIC SURFACES PREPARED BY PLASMA FLUORINATION OF LOTUS-LEAF-LIKE AMORPHOUS CARBON FILMS
Lotus-leaf-like amorphous carbon (a-C) films were fabricated on glass and Si substrates by a magnetron sputtering system and fluorinated in carbon tetrafluoride plasma. The fluorinated films (a-C:F) had a maximum contact angle (CA) of about 162Â°, which is much larger than that of the nonfluorinated films (105Â°). Furthermore, the geometric microstructure and chemical composition of the a-C:F films were investigated by scanning electron microscopy and Fourier transform infrared spectrometry, respectively. The characterization results indicated that the CA on the surfaces of the a-C:F films can be improved remarkably by the plasma-fluorinated process. Such a-C:F films that combine superhydrophobicity with other properties may have many potential applications.
Superhydrophobic, amorphous carbon films, wettability, plasma fluorination, scanning electron microscopy
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