English, Article edition: HIGH-QUALITY INTRINSIC ZnO FILM FOR THE APPLICATION OF SOLAR CELL GROWN BY ICP-ASSISTED REACTIVE DC MAGNETRON SPUTTERING AT LOW TEMPERATURE X. B. XU; S. M. HUANG; Y. W. CHEN; ...

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Physical Description
  • article
Language
  • English

Edition details

Title
  • HIGH-QUALITY INTRINSIC ZnO FILM FOR THE APPLICATION OF SOLAR CELL GROWN BY ICP-ASSISTED REACTIVE DC MAGNETRON SPUTTERING AT LOW TEMPERATURE
Author
  • X. B. XU
  • S. M. HUANG
  • Y. W. CHEN
  • Z. SUN
  • S. Y. HUANG
Physical Description
  • article
Notes
  • Intrinsic zinc oxide (i-ZnO) film was prepared for CuInSe2 (CIS) solar cell application [L. Stolt and J. Hedstrom, Appl. Phys. Lett. 62 (1993) 8; D. Rudmann, Ph.D. Thesis, University of Basel, Basel, (2004)] on glass substrate by inductively coupled plasma (ICP)-assisted DC magnetron sputtering and under a quite low temperature of 50°C. The sputtering was done in an Ar and O2 gas mixture and a ceramic ZnO target was used. The microstructures of the film were investigated by X-ray diffractometer and scanning electron microscope. It was shown that all of the films had a c-axis preferred orientation perpendicular to the substrate. In our work, film with resistivity of 7 à 108Ω·cm and transmittance of about 80% in the visible range was prepared under the conditions of 4 mTorr working pressure and 50°C temperature.
  • RePEc:wsi:srlxxx:v:14:y:2007:i:06:p:1083-1087
Language
  • English
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