English, Article edition: PREPARATION AND CHARACTERIZATION OF INDIUM OXIDE AND INDIUM TIN OXIDE FILMS BY ACTIVATED REACTIVE EVAPORATION K. NARASIMHA RAO; SANJAY KASHYAP

User activity

Share to:
 
Bookmark: http://trove.nla.gov.au/version/83682
Physical Description
  • article
Language
  • English

Edition details

Title
  • PREPARATION AND CHARACTERIZATION OF INDIUM OXIDE AND INDIUM TIN OXIDE FILMS BY ACTIVATED REACTIVE EVAPORATION
Author
  • K. NARASIMHA RAO
  • SANJAY KASHYAP
Physical Description
  • article
Notes
  • Transparent and conducting oxide films find many applications because of their excellent properties such as high optical transparency, low surface resistance, high infrared reflectance, etc. Realization of these properties depend upon the choice of the deposition technique and the control of deposition parameters. In this paper, we report the preparation of highly transparent and conducting films of indium oxide (In2O3) and indium tin oxide (ITO) by activated reactive evaporation on glass substrates. These films were deposited by evaporating pure indium and 90% In + 10% Sn alloy using an electron gun in the presence of oxygen ions at ambient temperature. Films of different thickness have been prepared and their optical, electrical and structural properties are studied. In2O3 films showed higher transparency (90%) compared to ITO films (85%) but the electrical resistivity was observed to be little higher (2.5 à 10-3 Ω cm) compared to ITO films (6 à 10-4 Ωcm). Hall measurements on aged ITO films gave the charge density of 3 à 1020 per cm3 and mobility 35.6 cm2/​V-s. The refractive index and extinction coefficient were found to be around 2.0 and 0.005 for ITO films and 2.10 and 0.001 for In2O3 films at 550 nm respectively. ITO and In2O3 films were amorphous in nature for lesser thickness, but for thicker films, the partial crystallinity was observed.
  • Transparent conducting oxide films, optical properties, electrical properties, activated reactive evaporation
  • RePEc:wsi:srlxxx:v:13:y:2006:i:02:p:221-225
Language
  • English
Contributed by
OAIster

Get this edition

  • Set up My libraries

    How do I set up "My libraries"?

    In order to set up a list of libraries that you have access to, you must first login or sign up. Then set up a personal list of libraries from your profile page by clicking on your user name at the top right of any screen.

  • All (1)
  • Unknown (1)
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.
None of your libraries hold this item.

User activity


e.g. test cricket, Perth (WA), "Parkes, Henry"

Separate different tags with a comma. To include a comma in your tag, surround the tag with double quotes.

Be the first to add a tag for this edition

Be the first to add this to a list

Comments and reviews

What are comments? Add a comment

No user comments or reviews for this version

Add a comment