2009, English, Article edition: Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage. Xie, H.; Rakotondrabe, M.; Régnier, S.

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Physical Description
  • text
Published
  • HAL - CCSD
  • 2009
Language
  • English

Edition details

Title
  • Characterizing piezoscanner hysteresis and creep using optical levers and a reference nanopositioning stage.
Author
  • Xie, H.
  • Rakotondrabe, M.
  • Régnier, S.
Published
  • HAL - CCSD
  • 2009
Physical Description
  • text
Subjects
Notes
  • A method using atomic force microscope (AFM) optical levers and a reference nanopositioning stage has been developed to characterize piezoscanner hysteresis and creep. The piezoscanner is fixed on a closed-loop nanopositioning stage, both of which have the same arrangement on each axis of the three spatial directions inside the AFM-based nanomanipulation system. In order to achieve characterization, the optical lever is used as a displacement sensor to measure the relative movement between the nanopositioning stage and the piezoscanner by lateral tracking a well-defined slope with the tapping mode of the AFM cantilever. This setup can be used to estimate a piezoscanner's voltage input with a reference displacement from the nanopositioning stage. The hysteresis and creep were accurately calibrated by the method presented, which use the current setup of the AFM-based nanomanipulation system without any modification or additional devices.
  • HAL:hal-00404732, version 1
  • HAL:http:/​/​hal.archives-ouvertes.fr/​hal-00404732/​en/​
  • DOI:10.1063/​1.3115184
Language
  • English
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